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DC poleHodnotaJazyk
dc.contributor.authorMojrová, Barbora
dc.contributor.authorBařinková, Pavlína
dc.contributor.authorBoušek, Jaroslav
dc.contributor.authorHégr, Ondřej
dc.contributor.authorBařinka, Radim
dc.contributor.authorHofman, Jiří
dc.contributor.editorPihera, Josef
dc.contributor.editorSteiner, František
dc.date.accessioned2015-01-19T07:58:31Z
dc.date.available2015-01-19T07:58:31Z
dc.date.issued2014
dc.identifier.citationElectroscope. 2014, č. 3, EDS 2014.cs
dc.identifier.issn1802-4564
dc.identifier.urihttp://147.228.94.30/images/PDF/Rocnik2014/Cislo3_2014/r8c3c1.pdf
dc.identifier.urihttp://hdl.handle.net/11025/11817
dc.format6 s.cs
dc.format.mimetypeapplication/pdf
dc.language.isoenen
dc.publisherZápadočeská univerzita v Plzni, Fakulta elektrotechnickács
dc.relation.ispartofseriesElectroscopecs
dc.rightsCopyright © 2014 Electroscope. All Rights Reserved.en
dc.subjectmikroskopie rastrující sondoucs
dc.subjectmikroskopie atomárních silcs
dc.subjectmikroskopie Kelvinovou sondoucs
dc.subjectkrystalický silikoncs
dc.subjectvýroba solárních článkůcs
dc.titleScanning Probe Microscopy in Technology of Solar Cells Productionen
dc.typečlánekcs
dc.typearticleen
dc.rights.accessopenAccessen
dc.type.versionpublishedVersionen
dc.description.abstract-translatedThis article deals with implementation of Scanning Probe Microscopy (SPM) techniques to the characterization of crystalline silicon solar cells. Atomic Force Microscopy (AFM) is used for the characterization of solar cells texture, because it allows three dimensional imaging of surface structure [1]. Aim of this part of work was to set up a new methodology for surface evaluation in terms of optimization of the texturing process in solar cells mass-production. Monocrystalline silicon (mono-Si) wafers were etched in strong and weak alkaline solutions, and in strong acid solution which corresponds to standard methods of solar cells production. A detailed description of the surface was based on inspection of roughness parameters which were determined by the analysis of surface images. The second part of this work deals with possibility of Kelvin Probe Force Microscopy (KPFM) application for detection of Back Surface Field (BSF) presence and measurement its depth. KPFM enables to image surface electronic properties – specifically the Contact Potential Difference (UCPD) [2]. This method was used for checking the aluminum BSF (Al-BSF) layer presence and for measuring its depth.en
dc.subject.translatedscanning probe microscopyen
dc.subject.translatedatomic force microscopyen
dc.subject.translatedKelvin probe force microscopyen
dc.subject.translatedcrystalline siliconeen
dc.subject.translatedsolar cells productionen
dc.type.statusPeer-revieweden
Vyskytuje se v kolekcích:Číslo 3 (2014)
Číslo 3 (2014)

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  1. DSpace at University of West Bohemia
  2. Publikace ZČU / UWB Publications
  3. Časopisy ZČU / UWB Journals
  4. Electroscope
  5. Ročník 2014
  6. Číslo 3 (2014)