Title: Designed and fabrication of ENR polymer rib optical waveguides
Authors: Prajzer, Václav
Lyutakov, Oleksiy
Veselý, Tomáš
Hüttel, Ivan
Machač, Petr
Jeřábek, Vítězslav
Citation: Electroscope. 2009, Konference EDS 2009.
Issue Date: 2009
Publisher: Západočeská univerzita v Plzni, Fakulta elektrotechnická
Document type: článek
konferenční příspěvek
article
conferenceObject
URI: http://147.228.94.30/images/PDF/Rocnik2009/EDS_2009/prajzler.pdf
http://hdl.handle.net/11025/535
ISSN: 1802-4564
Keywords: polymerní žebrové optické vlnovody;epoxidová pryskyřice;elektrotechnická výroba
Keywords in different language: polymer rib optical waveguides;epoxy resin;electrical manufacturing
Abstract in different language: We report about design, fabrication and properties of the Epoxy Novolak Resin (ENR) polymer rib optical waveguides. Polymer waveguides were fabricated on silicon substrate with silica buffer layer and Epoxy novolak resin was used as the waveguide core material. Polymethylmethacrylate was used as a cover protection layer. The optical waveguides were designed by using software RSOFT using Beam propagation method and the minimum (critical) waveguiding thicknesses of the deposited layers were calculated using dispersion equation. Polymer layers were fabricated by spin coating and optical waveguides were form by using standard photolithography process. Propagation optical loss measurements were carried at 650 nm and 1310 nm using the cut-back method and the best samples had optical losses lower than 1.0 dB/cm at 650 nm and 0.6 dB/cm at 1310 nm.
Rights: Copyright © 2007-2010 Electroscope. All Rights Reserved.
Appears in Collections:Konference EDS 2009
EDS 2009 (2009)

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