Title: A novel hybrid integrated system for capacitive pressure MEMS sensors
Authors: Háze, Jiří
Pavlík, Michal
Vrba, Radimír
Citation: Electroscope, 2008, Konference EDS 2009.
Issue Date: 2009
Publisher: Západočeská univerzita v Plzni, Fakulta elektrotechnická
Document type: článek
konferenční příspěvek
ISSN: 1802-4564
Keywords: kapacitní senzory tlaku MEMS;hybridní integrované obvody;zpracování signálu
Keywords in different language: capacitive pressure MEMS sensors;hybrid integrated systems;signal processing
Abstract in different language: The paper deals with a novel hybrid integrated system for capacitive pressure MEMS sensors. This system should be splitted into the two parts. One is novel integrated capacity-to-current converter (C/I) and the second is auxiliary part made from standard SMD devices. The C/I converter was designed in CMOS process with technology AMIS 0,7 um. The second part consists of the sigma-delta converter, microcontroller, communication and data bus. The designed system profits from the previous works, where the capacity-to-digital output converter AD 7745 is the main part of the processing stage. This converter is substituted by the novel C/I converter. The C/I converter with digital calibration handled in microcontroller provide almost the same accuracy and linearity as the mentioned AD 7745 converter, but with less complexity of the whole circuitries.
Rights: Copyright © 2007-2010 Electroscope. All Rights Reserved.
Appears in Collections:EDS 2009 (2009)

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Please use this identifier to cite or link to this item: http://hdl.handle.net/11025/548

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