| Title: | A novel hybrid integrated system for capacitive pressure MEMS sensors |
| Authors: | Háze, Jiří Pavlík, Michal Vrba, Radimír |
| Citation: | Electroscope, 2008, Konference EDS 2009. |
| Issue Date: | 2009 |
| Publisher: | Západočeská univerzita v Plzni, Fakulta elektrotechnická |
| Document type: | článek konferenční příspěvek article conferenceObject |
| URI: | http://147.228.94.30/images/PDF/Rocnik2009/EDS_2009/haze.pdf http://hdl.handle.net/11025/548 |
| ISSN: | 1802-4564 |
| Keywords: | kapacitní senzory tlaku MEMS;hybridní integrované obvody;zpracování signálu |
| Keywords in different language: | capacitive pressure MEMS sensors;hybrid integrated systems;signal processing |
| Abstract in different language: | The paper deals with a novel hybrid integrated system for capacitive pressure MEMS sensors. This system should be splitted into the two parts. One is novel integrated capacity-to-current converter (C/I) and the second is auxiliary part made from standard SMD devices. The C/I converter was designed in CMOS process with technology AMIS 0,7 um. The second part consists of the sigma-delta converter, microcontroller, communication and data bus. The designed system profits from the previous works, where the capacity-to-digital output converter AD 7745 is the main part of the processing stage. This converter is substituted by the novel C/I converter. The C/I converter with digital calibration handled in microcontroller provide almost the same accuracy and linearity as the mentioned AD 7745 converter, but with less complexity of the whole circuitries. |
| Rights: | Copyright © 2007-2010 Electroscope. All Rights Reserved. |
| Appears in Collections: | EDS 2009 (2009) |
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