Title: | Numerical Approach to the Problem of Digital DLTS Measurements Signal analysis |
Authors: | Kósa, Arpád Rybár, Jakub Stuchlíková, Ľubica |
Citation: | Electroscope. 2013, č. 5, EEICT + EDS. |
Issue Date: | 2013 |
Publisher: | Západočeská univerzita v Plzni, Fakulta elektrotechnická |
Document type: | článek article |
URI: | http://147.228.94.30/images/PDF/Rocnik2013/Cislo5_2013/r7c5c10.pdf http://hdl.handle.net/11025/6624 |
ISSN: | 1802-4564 |
Keywords: | numerické modelování;tranzientní spektroskopie hlubokých hladin;elektrotechnická měření |
Keywords in different language: | numerical modelling;deep level transient spectroscopy;electrical measurements |
Abstract in different language: | This paper presents a novel approach in the investigation of the parameters of deep energy levels in digital DLTS (Deep Level Transient Spectroscopy) measurements. A DLTS spectra fitting algorithm and by this the calculation of the activation energy capture cross section and the trap concentration of deep energy levels is proposed. As a final result the match between fitted and evaluated parameters are presented. The fitted curves are used as representatives for a peak in the DLTS spectra. The measured DLTS signals were used for the results comparison of the numerical fitting approach and the standard DLTS direct evaluation method. |
Rights: | © 2013 Electroscope. All rights reserved. |
Appears in Collections: | Číslo 5 (2013) Číslo 5 (2013) |
Files in This Item:
File | Description | Size | Format | |
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r7c5c10.pdf | Plný text | 355,42 kB | Adobe PDF | View/Open |
Please use this identifier to cite or link to this item:
http://hdl.handle.net/11025/6624
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