| Title: | A novel laboratory anodic bonding device for MEMS applications |
| Authors: | Pekárek, Jan Háze, Jiří Pavlík, Michal Vrba, Radimír |
| Citation: | Electroscope. 2010, č. 3, EDS 2010. |
| Issue Date: | 2010 |
| Publisher: | Západočeská univerzita v Plzni, Fakulta elektrotechnická |
| Document type: | konferenční příspěvek conferenceObject |
| URI: | http://147.228.94.30/images/PDF/Rocnik2010/Cislo3_2010_EDS/r4c3c12.pdf http://hdl.handle.net/11025/585 |
| ISSN: | 1802-4564 |
| Keywords: | anodické lepení;aplikace MEMS |
| Keywords in different language: | anodic bonding;MEMS applications |
| Abstract in different language: | The article deals with a novel laboratory anodic bonding device. This device is used for MEMS creation. The anodic bonding is a method for joining glass with silicon. It is one of the important steps of MEMS components packaging. The bonding mechanism joins the glass and silicon by heating them above 400 °C and by applying an external DC electric field in a range of 500 – 1000 V. The bonded region can be seen easily through the glass because it changes the color to gray. The measured bonding strength is over 15 MPa and the cracks occur on the glass, i.e. the bonding strength is over the mechanical strength of the glass. |
| Rights: | Copyright © 2007-2010 Electroscope. All Rights Reserved. |
| Appears in Collections: | Číslo 3 - EDS 2010 (2010) Číslo 3 - EDS 2010 (2010) |
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| File | Description | Size | Format | |
|---|---|---|---|---|
| r4c3c12.pdf | 514,99 kB | Adobe PDF | View/Open |
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